Thermal Evaporator Power Supplies and Sources

Oxford Vacuum Science specialises in thermal evaporator technology. With the flexible modular design of their bench-top high vacuum platforms and of the VapourPhase resistive evaporator technology, multiple resistive and electron beam heated sources can be combined in a single deposition level within a bench-top coater format, with the eb source even being able to benefit from some of VapourPhase's options such as integrated low level rate ramp monitors and individual source shutters.

VapourPhase Ω

high performance resistively heated thermal evaporator for metals and ceramics:

600A / 3.6kW or 400A / 2.4kW on-board power
up to 6-way sequentially switched thermal evaporation sources for multi-layer deposition
high reflectivity, removeable baffles for maximum efficiency and minimum cross-contamination between sources
flexible power rail evaporation source terminal mounting system
water cooling to reduce out-gassing from adjacent surfaces (not 400A version)
rapid release evaporation source clamping system
current, voltage and power control via front panel, RS232 or analogue interfaces

options and accessories:

dual tap power rails and evaporation source clamps for higher voltage sources
individual evaporation source shutters
low level individual "rate ramp" quartz crystal monitor heads
dual technique deposition with minature e-beam deposition source integration:

miniature eb source, Telemark R508

miniature eb source configured for NanoSphere bench-top coater

compact 270° electron beam evaporation source

integrable with VapourPhase Ω in Oxford Vacuum Science's NanoSphere and PicoSphere bench-top high vacuum platforms:

1.5cc miniature R508 electron beam deposition source from Telemark
270° beam deflection angle to prevent filament contamination
fits between VapourPhase Ω side baffles to prevent cross-contamination with resistive sources
compatible with VapourPhase Ω evaporation source shutter
compatible with VapourPhase Ω rate ramp monitor
3kW switchmode "Warp 3 FX" filament bias power supply with integrated filament power supply from beamtec

To find out more about Oxford Vacuum Science's thermal evaporator and electron beam deposition source range e-mail us at technology@oxford-vacuum.com.

Oxford Vacuum Science Ltd
18 Enstone Road
Middle Barton
Oxfordshire
OX7 7BN UK

tel: +44 (0) 7495 463875

OVS@oxford-vacuum.com