VapourPhase Ω VapourPhase Ω -
  high performance thermal evaporation

VP accessories



vacuum platforms NanoSphere bench-top high vacuum platform

deposition sources VapourPhase Ω -
  high performance thermal evaporation

substrate platens substrate platens

accessories system components

E-VAP 3000

miniature eb source

MDC Vacuum's E-VAP 3000 miniature electron beam deposition source can be integrated into Oxford Vacuum Science's NanoSphere 4 and PicoSphere bench-top high vacuum platforms as part of a thermal evaporation suite with VapourPhase Ω. The source is fitted with its moutning axis perpendicular to that of VapourPhase Ω such that the melt is on the centreline of the chamber with up to two resistive sources either side. As it is aligned with the power rails the source can be used with accessories such as indivual source shutters and rate ramp deposition monitors


To find out more about Oxford Vacuum Science's deposition source range e-mail us at technology@oxford-vacuum.com.


Oxford Vacuum Science Ltd
18 Enstone Road
Middle Barton
Oxfordshire
OX7 7BN UK

tel: +44 (0) 7495 463875

OVS@oxford-vacuum.com


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