Substrate mounting and manipulation
Oxford Vacuum Science has developed a range of substrate mounting platens for use in deposition-up coating systems. Mounted via the
top-port of NanoSphere and PicoSphere
systems the substrate platens are all NW 100CF-F compatible (but not bakeable beyond 150°C) and range from small,
static substrate platens with integrated shutters and deposition monitors for integration into the simplest of systems, to large rotary
substrate platens capable of accommodating 12" wafers, whilst 'butterfly' valve type substrate transfer platens allow
substrates to be changed without breaking main chamber vacuum in near UHV systems.
static substrate platens for NanoSphere 3:
- top-port mounting for maximum deposition distance
- water-cooling channel for temperature sensitive substrates
- quick release removeable substrate mounting plate
- supplied with four sliding clamps with 6 x 4 mounting points to accommodate all substrate sizes up to Ø75mm
(3")
- available with integrated substrate shutter and quartz crystal deposition monitor head
- contact OVS to discuss substrate heating options
rotary substrate platens for VapourStation 4 and 5:
- continuously variable substrate rotation speed powered directly from NanoSphere plinth and controlled by NanoSphere
software
- ferrofluidic rotary seal for optimum seal with minimum rotational friction
- Ø140mm, Ø190mm and Ø240mm overall substrate platen sizes for substrates up to
Ø115mm (4½"),Ø165mm (6½") and Ø215mm (8½") respectively
- quick release removeable substrate mounting plate
- supplied with eight sliding clamps with close pitched mounting points to accommodate all substrate sizes
- available with rear side halogen substrate platen heaters for rapid substrate heating up to 475°C
- contact OVS to discuss substrate cooling options
substrate transfer platens for PicoSphere:
- top-port mounting for maximum deposition distance
- substrate loading chamber pumped by backing pump and drag stage of turbo pump - no additional pumps needed - with low
transfer pressure (10-3mbar range)
- simple, 'butterfly' valve mechanism with substrate platen mounted on valve plate with horizontal air-side substrate
position for ease of mounting
- water-cooling channel for temperature sensitive substrates
- supplied with four sliding clamps with close pitched mounting points to accommodate all substrate sizes up to
Ø75mm (3")
- contact OVS to discuss quick release removeable substrate mounting plate
- contact OVS to discuss substrate heating options
- contact OVS to discuss integrated shutter and deposition monitor head options
To find out more about Oxford Vacuum Science's substrate platen range e-mail us at
technology@oxford-vacuum.com.
Oxford Vacuum Science Ltd
18 Enstone Road
Middle Barton
Oxfordshire
OX7 7BN UK
tel: +44 (0) 7495 463875
OVS@oxford-vacuum.com
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